A Practical OEM Checklist for Specifying a Mica Heater

https://flexible-heater-insights.evergrovio.com/posts/why-temperature-uniformity-matters-in-wafer-heater-design

In heated plates, a mica heater must deliver heat in a controlled way. It uses a resistive heating circuit supported and insulated by mica. One useful trait is high-temperature capability. Still, mechanical stress can change the result