Designing Heating Zones in a Semiconductor Heater for Better Thermal Balance

https://smart-heating-solutions.hexaforgey.com/posts/how-heating-and-cooling-functions-can-be-combined-in-a-wafer-heater

In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery